Micro-machining technology.

Micro Machining-A Review

In recent years, advanced materials with unique metallurgical properties such as super alloys, composites and ceramics have been developed to meet the demands of extreme applications. While these materials are harder, tougher, less heat sensitive and more resistant to corrosion and fatigue, they are also difficult to machine. Advanced materials are being widely used these days not only in the a...

Machining Technology Developments

Batch Mode Micromanufacturing Based on Micro Electro-discharge Machining and Micro Ultrasonic Machining for Micro Electro Mechanical Systems (mems)

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...

Focused Ion Beam Micro Machining and Micro Assembly

The ability to manufacture and manipulate components at the micro-scale is critical to the development of micro systems. This paper presents the technique to manipulate micro/nano parts at the micro/nano-scale using an integrated Focused Ion Beam (FIB) system composed of scanning electron microscope, micro manipulator and gas injection system. Currently the smallest gears manufactured with trad...

Cellular Automata Modelling of Micro Abrasive Machining

This paper presents the use of Cellular Automata (CA) for modelling micro abrasive machining. A onedimensional CA was initially used to model the workpiece, as having different heights, to represent the roughness; and the forces from the abrasive grits were modelled to randomly erode the workpiece, as such smoothening out and polishing the surface. The modelling was then extended further to two...